JPH0451332U - - Google Patents
Info
- Publication number
- JPH0451332U JPH0451332U JP9337590U JP9337590U JPH0451332U JP H0451332 U JPH0451332 U JP H0451332U JP 9337590 U JP9337590 U JP 9337590U JP 9337590 U JP9337590 U JP 9337590U JP H0451332 U JPH0451332 U JP H0451332U
- Authority
- JP
- Japan
- Prior art keywords
- axis
- stage
- section
- coarse
- fine movement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 4
- 238000007689 inspection Methods 0.000 description 1
Landscapes
- Machine Tool Units (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9337590U JPH0451332U (en]) | 1990-09-05 | 1990-09-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9337590U JPH0451332U (en]) | 1990-09-05 | 1990-09-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0451332U true JPH0451332U (en]) | 1992-04-30 |
Family
ID=31830529
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9337590U Pending JPH0451332U (en]) | 1990-09-05 | 1990-09-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0451332U (en]) |
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1990
- 1990-09-05 JP JP9337590U patent/JPH0451332U/ja active Pending